Suppression of Stiction Force by All-Vapor Processes using HF, Ozone, and HMDS for MEMS Devices
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چکیده
منابع مشابه
Suppression of Stiction in MEMS
Stiction failures in microelectromechanical systems (MEMS) occur when suspended elastic members are unexpectedly pinned to their substrates. This type of device failure develops both in fabrication and during device operation, being a dominant source of yield loss in MEMS. Stiction failures require first a collapse force that brings the elastic member contact with the substrate followed by an i...
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ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 2007
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.127.221